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Heat Exchange Chiller ETCU

Heat Exchange Chiller (Semiconductor temperature control )

ETCU 5℃~90℃

Temp Range: +5℃~90℃   ±0.3℃

Cooling Capacity: 5kw~30kw

Tank volume: 6L~15L

Power: 06KW~1.6KW

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Model ETCU-005W ETCU-015W ETCU-030W ETCU-050W ETCU-100W ETCU-200W ETCU-300W
Temperature range Cooling water temperature +5℃~90℃
Temperature control accuracy ±0.05℃ (outlet temperature steady state)
Cooling water temperature 7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow
Cooling capacity 5kw 15kw 30kw 50kw 100kw 200kw 300kw
Circulating pump flow Test conditions: At maximum circulation, the temperature difference between the control temperature and the cooling water temperature is 15°C
Storage tank volume 7~20L/min 5bar 15~40L/min 5bar 20~60L/min 5bar 40~110L/min 5bar 150~250L/min 5bar 250~500L/min 5bar 400~650L/min 5bar
Dimensions 5L 10L 20L 30L 60L 120L 240L
Dimensions 480*750*390 480*750*390 480*750*500 Customization Customization Customization Customization

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