


Model | FLTZ-002 | FLTZ-003 | FLTZ-004 | FLTZ-006 | FLTZ-008 | FLTZ-010 | FLTZ-015 |
FLTZ-002W | FLTZ-003W | FLTZ-004W | FLTZ-006W | FLTZ-008W | FLTZ-010W | FLTZ-015W | |
Temperature range | 5℃~90℃ | ||||||
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | ||||||
Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R410A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
Model | FLTZ-1002W | FLTZ-1004W |
Temperature range | -100℃~+90℃ | |
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | |
Flow control | 7~25L/min | 12~45L/min |
Cooling capacityat-90℃ | 1.5kW | 3kW |
Heating capacity | 3.5kW | 5.5kW |
Internal circulating fluid volume | 5L | 8L |
Expansion tank volume | 10L | 15L |
Heat-conduction medium | Fluorinated liquid | |
Connection size | ZG3/4 | ZG3/4 |
Cooling water connection size | ZG3/4 | ZG1 |
Cooling water@20℃ | 50L/min 2bar~7bar | 100L/min 2bar~7bar |
Circuit breaker | 32A | 63A |
Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
Model | FLTZ-002 | FLTZ-003 | FLTZ-004 | FLTZ-006 | FLTZ-008 | FLTZ-010 | FLTZ-015 |
FLTZ-002W | FLTZ-003W | FLTZ-004W | FLTZ-006W | FLTZ-008W | FLTZ-010W | FLTZ-015W | |
Temperature range | 5℃~90℃ | ||||||
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | ||||||
Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R410A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
||||||
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
Model | FLTZ-202 | FLTZ-203 | FLTZ-204 | FLTZ-206 | FLTZ-208 | FLTZ-210 | FLTZ-215 |
FLTZ-202W | FLTZ-203W | FLTZ-204W | FLTZ-206W | FLTZ-208W | FLTZ-210W | FLTZ-215W | |
Temperature range | -25℃~90℃ | ||||||
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | ||||||
Flow control | 10~25L/min | 15~45L/min | 25~75L/min | ||||
Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R404A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
||||||
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
Model | FLTZ-402 | FLTZ-403 | FLTZ-404 | FLTZ-406 | FLTZ-408 | FLTZ-410 | FLTZ-415 |
FLTZ-402W | FLTZ-403W | FLTZ-404W | FLTZ-406W | FLTZ-408W | FLTZ-410W | FLTZ-415W | |
Temperature range | -45℃~90℃ | ||||||
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | ||||||
Flow control | 10~25L/min 5bar max | 15~45L/min 5bar max | 25~75L/min 5bar max | ||||
Heating | Using compressor heating, prevent condenser frosting technology | ||||||
Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R404A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
||||||
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*500*1500 | 1080*500*1500 |
Model | ETCU-005W | ETCU-015W | ETCU-030W | ETCU-050W | ETCU-100W | ETCU-200W | ETCU-300W |
Temperature range | Cooling water temperature +5℃~90℃ | ||||||
Temperature control accuracy | ±0.05℃(Steady state outlet temperature) | ||||||
Cooling water temperature | 7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves | ||||||
Cooling capacity | 5kW | 15kW | 30kW | 50kW | 100kW | 200kW | 300kW |
Test conditions: When the maximum circulation amount, the temperature difference between the temperature control temperature and the cooling water temperature is 15℃ |
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Circulation pump | 7~20L/min 5bar | 15~40L/min 5bar | 20~60L/min 5bar | 40~110L/min 5bar | 150~250L/min 5bar | 250~500L/min 5bar | 400~650L/min 5bar |
Tank volume | 5L | 10L | 20L | 30L | 60L | 120L | 240L |
Dimension cm | 480*750*390 | 480*750*390 | 480*750*500 | Customization | Customization | Customization | Customization |



Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
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