LNEYA CHILLERS
FLT -100℃~90℃
semiconductor production process water chiller- Temperture accuracy±0.1℃
- Flow control12~45L/min
- Power range380V
- Chiller sizeSupport customization
Chillers for Semiconductor
LNEYA designs and manufactures high-quality semiconductor chillers tailored for semiconductor machinery and chip production processes.
• Comprehensive Product Line: Offering cooling capacities from 0.5 to 98 tons to meet diverse requirements.
• High-Quality Components: Equipped with premium compressors, stainless steel water tanks, and pumps for efficient, clean, and reliable operation.
• Compact and Durable Design: Suitable for indoor or outdoor installation, with a waterproof structure and compact footprint.
• Wide Applications: Ideal for wafer chuck cooling/heating, ATE testing, laser trimming, metrology tools, and UV curing systems.
• Custom Solutions: With over 20 years of experience, LNEYA can provide standard systems or customized solutions for semiconductor cooling needs.
We have the semiconductor chiller you need
chiller product features
Variable frequency pump can adjust the circulating liquid pressure and flow rate
The output pressure and flow rate of the circulating liquid can be set on the operation panel. Even under various customer piping conditions, without bypass piping adjustment, it can be automatically controlled at the set output pressure through a variable frequency pump. As a result, the power consumption of the pump can be reduced.
Depending on the flow rate, bypass piping may be required
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater
Standard serial communication (RS232C,RS485) and contact input/output (3 points output, 2 points input). Depending on the purpose, you can communicate with customer devices or build systems. In addition, there is also a DC24V output, which can be used when setting the flow switch, etc.
The control interface of the refrigeration and heating temperature control system, multi-function image shows a variety of related information
Display: real-time temperature of each temperature control point, exhaust suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electric power, current of each component, voltage, water tank liquid level, etc
Customized Solutions for your Process Needs
CUSTOM CHILLER SIZES
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements.
No matter how many tons of chiller you need, we can create the best solution.
CUSTOM TEMPERATURE RANGES
We can create a custom solution for temperatures from -150℃ to +350℃.
Custom temperature ranges for specific industries.
CUSTOM COOLING CAPACITY
We offer a very wide range of cooling capacities for various industries.
CUSTOM CHILLER TYPES
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers.
Regardless of the type of refrigeration compressor, we can design it according to your requirements.
CUSTOM CHILLER ACCESSORIES
We use a variety of internationally renowned accessories, all of which can be customized for your needs, such as compressors, evaporators, heat exchangers, circulation pumps, controllers, expansion valves and shell materials, etc.
CUSTOM CHILLER VOLTAGE
Customize chiller voltage and phase according to your needs.
Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
You can trust our chiller factories
We are a very powerful chiller supplier with our own factory and more than 20 years of experience in the field of temperature control
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