LNEYA CHILLERS
Semiconductor Cooling Chiller
FLTZ -45℃~90℃- Temperture accuracy±0.1℃
- Flow control25~75/min 6bar max
- RefrigentR404A
- Power range380V 3.5kW~16kW
Temperature control in semiconductor production and testing processes
Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours
Ensure stable and reliable overall semiconductor process flow from front-end to back-end
Product Description
The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.
The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.
Heating method within 40 ℃ adopts compressor hot gas heating.
The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.
Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.
The chiller runs the copying machine continuously for 24 hours at 100%.
chillers that control the processing temperature on the Fab equipments
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Configuration Details
| Model | FLTZ-002/002W | FLTZ-003/003W | FLTZ-004/004W | FLTZ-006/006W | FLTZ-008/008W | FLTZ-010/010W | FLTZ-015/015W |
|---|---|---|---|---|---|---|---|
| Temperature Control | 5℃～90℃ | ||||||
| Temperature Accuracy | ±0.05℃ | ||||||
| Flow Control | 10～25L/min, 5bar max | 15～45L/min, 6bar max | 25～75L/min, 6bar max | ||||
| Refrigeration Capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal Circulation Liquid Volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion Tank Capacity | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Secondary Refrigerant | Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10℃) | ||||||
| Entry and Exit Interfaces | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling Water Outlet | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling Water Flow Rate @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Power Supply (380V) | 3.5kW | 4kW | 5.5kW | 7kW | 9.5kW | 12kW | 16kW |
| Temperature Extension | By adding an electric heater, expand the temperature range from -25℃ to 80℃ | ||||||
| Model | FLTZ-202 FLTZ-202W |
FLTZ-203 FLTZ-203W |
FLTZ-204 FLTZ-204W |
FLTZ-206 FLTZ-206W |
FLTZ-208 FLTZ-208W |
FLTZ-210 FLTZ-210W |
FLTZ-215 FLTZ-215W |
| Temp Range | -25℃～90℃ | ||||||
| Temp Control Accuracy | ±0.05℃ | ||||||
| Flow Control | 10～25L/min ±0.3 | 15～45L/min ±0.3 | 25～75L/min ±0.3 | ||||
| Adjusted by a frequency converter; max pressure: 5bar. | |||||||
| Refrigeration @-15℃ |
2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
| Internal Circulation Fluid Volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion Tank Volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Secondary Refrigerant | Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc. | ||||||
| Ingress/Egress Interface | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling Water Connection | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling Water Flow @20℃ |
1.2m³/h | 1.6m³/h | 2.6m³/h | 3.6m³/h | 5.5m³/h | 7m³/h | 10.2m³/h |
| Power (380V) |
3kW | 4kW | 6kW | 8kW | 9kW | 13kW | 17kW |
| Temp Expansion | Can extend to -25℃~80℃ with an electric heater. | ||||||
| Model | FLTZ-402 FLTZ-402W |
FLTZ-403 FLTZ-403W |
FLTZ-404 FLTZ-404W |
FLTZ-406 FLTZ-406W |
FLTZ-408 FLTZ-408W |
FLTZ-410 FLTZ-410W |
FLTZ-415 FLTZ-415W |
| Temp Control | -45℃～90℃ | ||||||
| Temp Control Accuracy | ±0.05℃ | ||||||
| Flow Control | 10～25L/min, 5bar max | 15～45L/min, 6bar max | 25～75L/min, 6bar max | ||||
| Compressor heating prevents condenser frosting. | |||||||
| Refrigeration Capacity @-35℃ |
1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
| Internal Circulation Fluid Volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion Tank Volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Secondary Refrigerant | Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc. | ||||||
| Ingress/Egress Interface | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG3/4 |
| Cooling Water Connection | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling Water Flow @20℃ |
1.5m³/h | 2.4m³/h | 3.5m³/h | 5m³/h | 5.5m³/h | 6m³/h | 8m³/h |
| Power (380V) |
3kW | 4kW | 6kW | 7.5kW | 9kW | 12kW | 15kW |
| Temperature Expansion | Can extend to -25℃~80℃ with an electric heater. | ||||||
Communication function
Standard equipment includes serial
Communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.
client output signal
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