LNEYA CHILLERS
AET -75℃~250℃
Air Cooling Chiller For chuck/chamber/Heat plate- Temperature Control Accuracy±0.5℃
- Air treatment22m³/h~95m³/h
- Cooling Typewater cooling/air cooling
Suitable for IC testing of all kinds of semiconductor chips,flash memory Flash/EMMC, PCB circuit boards, opticalcommunications,electronic industries, etc.
Parameters Detailed
| Model | AET-4025 | AET-4050 | AET-4095W | AET-7025 | AET-7050W | AET-7095W |
| AET-4025C | AET-4050C | AET-4095WC | AET-7025C | AET-7050WC | AET-7095WC | |
| Temperature range | -40℃～250℃ | -75℃～250℃ | ||||
| Temperature control accuracy | Gas outlet temperature control ±0.1°C, long-distance process temperature control accuracy ±0.5°C. You can choose to control the outlet gas temperature and process target temperature. | |||||
| Upgrade temperature rate | The temperature rise and fall rate of the gas temperature at the equipment outlet is greater than 30°C/min, and gradient temperature rise and fall can be performed. | |||||
| Air requirements | Air filter <5um Air oil content <0.1um Air temperature and humidity: 5°C-32℃ 0-50%RH Pressure 4bar~8bar. | |||||
| Air treatment | 22m³/h | 50m³/h | 95m³/h | 22m³/h | 50m³/h | 95m³/h |
| Throttling method | The refrigeration system uses electronic expansion valve throttling to accurately control the cooling capacity. | |||||
| Controller | PLC programmable controller, standard support Modbus RTU protocol, RS485 interface, other communication protocols can be selected. | |||||
| Display record | 7-inch color touch screen, can display gas temperature, pressure, flow, refrigeration system pressure and temperature. | |||||
| Process temperature control | Self-created model-free self-building tree algorithm combined with general anti-lag cascade algorithm to control process temperature. | |||||
| Dimensions cm | 43*46*112 | 52*57*132 | 60*63*160 | 54*69*112 | 65*85*132 | 75*95*160 |
| Remarks | Suffix W represents water cooling and suffix C represents gas recycling. | |||||
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