Heat Exchange Chiller (Semiconductor temperature control )
ETCU 5℃~90℃Temp Range: +5℃~90℃ ±0.3℃
Cooling Capacity: 5kw~30kw
Tank volume: 6L~15L
Power: 06KW~1.6KW
Temperature control in semiconductor production and testing processes
Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours
Ensure stable and reliable overall semiconductor process flow from front-end to back-end
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