LNEYA CHILLERS
ZLJ -40℃~-15℃
Air cooled chiller for semiconductor production process- Compressor1.5hp~7hp
- RefrigentR404A R507C R448
- Power range380V 50HZ can choose 220V
- Temperture accuracy±0.5℃
Temperature control in semiconductor production and testing processes
CHILLER direct cooling type
Multiple control requirements can be achieved by merging multiple devices into a larger cabinet
Used for small heat exchange area and large heat exchange capacity
Configuration Details
| Model | ZLJ-41.0 | ZLJ-41.5 | ZLJ-42 | ZLJ-43 | ZLJ-44 | ZLJ-46 | ZLJ-48 |
|---|---|---|---|---|---|---|---|
| ZLJ-41.0W | ZLJ-41.5W | ZLJ-42W | ZLJ-43W | ZLJ-44W | ZLJ-46W | ZLJ-48W | |
| Temperature range | -40℃～-10℃ | ||||||
| Temperature control accuracy | ±0.5℃ control evaporation temperature | ||||||
| Throttling method | Electronic expansion valve | ||||||
| Controller | Siemens PLC | ||||||
| Show record | 7-inch touch screen, record temperature, system pressure and other information | ||||||
| Main components | Danfoss filter drier, Castor solenoid valve, Johnson Controls pressure sensor, EBM fan (air-cooled), Danfoss/Emerson oil separator, | ||||||
| Compressor | Secop, Taikang, Emerson, Carlisle | ||||||
| Refrigerant | R404A Optional R507C R448 | ||||||
| High temperature cooling | With 150 degrees high temperature direct cooling technology, to meet the goal of rapid cooling ability during high temperature operation | ||||||
| Compressor Size | 7/8HP | 1.5HP | 2HP | 3HP | 4HP | 6HP | 8HP |
| Power supply V | 220V 50HZ | 380V 50HZ Can be customized 220V | |||||
Product Description
Equipped with direct cooling technology at a high temperature of 150℃, meeting the target of rapid cooling ability during high-temperature operation
The product directly outputs and evaporates the refrigerant in the refrigeration system into the target control element (heat exchanger) for heat exchange, thereby cooling the target control object. Compared with the fluid (gas) transported into the heat exchanger, the heat exchange capacity is generally more than 5 times higher, which is especially suitable for applications where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large.
The direct-cooling refrigerator can also be used as gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.
appearance
1.Refrigerant interface 2. Portable handle
3. Touch screen 4. Portable handle
5. Touch screen card slot 6. Air outlet
Security protection
Using Schneider and other brands of residual current circuit breakers, phase sequence phase breakers, liquid level protectors, high and low voltage protectors, and high temperature protectors
Data communication interface
Standard configuration includes one PT100, USB interface, and RS485 communication interface. Various other analog interfaces and contact signals can be selected, as well as Ethernet interface
Application Process
Widely applicable to etching, chemical vapor deposition, and physical vapor deposition processes in semiconductor wafer factories
Wafer etching
Chemical vapor deposition
Physical vapor deposition
ETCH
CVD
PVD
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