LNEYA CHILLERS
What is a Chiller?
In modern industrial production, temperature control technology plays a vital role, especially in the field of high-precision semiconductor manufacturing. As the core equipment of the temperature control system, the chiller is widely used in semiconductor production lines to ensure that various types of equipment can operate stably at a suitable temperature and avoid temperature fluctuations that have adverse effects on product quality and equipment life. The chiller can not only efficiently control the heat generated in the production process, but also plays an irreplaceable role in many high-precision processes. This article will explore in depth the working principle, main components and importance of the chiller in semiconductor production, and further understand its key role in improving production efficiency and ensuring product quality.
1. The cooling principle of a chiller and its main components.
The cooling principle of a chiller is based on the thermodynamic vapor compression cycle or absorption cycle. The main components of a chiller include the compressor, condenser, expansion valve, evaporator, and refrigerant.
1. 1Compression
The process begins with the compressor, which compresses the low-temperature, low-pressure gaseous refrigerant into a high-temperature, high-pressure gas. This is akin to a pump vigorously inflating, causing pressure and temperature to rise sharply.
1.2 Throttling
The liquid refrigerant then passes through the expansion valve (also called a throttling valve), where its pressure drops suddenly, similar to sliding down from a high point. The temperature also decreases, and part of the liquid evaporates, resulting in a low-temperature, low-pressure mixture of liquid and gas.
1.3 Condensation
Next, the high-temperature, high-pressure gaseous refrigerant enters the condenser, interacting with cooling water or air. Heat is removed, and the refrigerant transforms into a medium-temperature, high-pressure liquid. You can think of it as “cooling down” and releasing excess heat.
1.4 Evaporation
The refrigerant enters the evaporator, where it absorbs heat from the secondary coolant (e.g., water or glycol solution) and completely transitions into a gaseous state. This heat absorption cools the secondary coolant, achieving the desired cooling effect.
1.5 Cycle
Finally, the gaseous refrigerant returns to the compressor, starting a new cycle all over again.
2.Why does semiconductor manufacturing require chillers?
In semiconductor manufacturing, chillers are indispensable “unsung heroes.” Their primary role is to control temperature precisely, as processes like photolithography and etching have extremely stringent temperature requirements. Even slight fluctuations can affect wafer quality. Chillers provide stable cooling water, ensuring the equipment maintains optimal temperature.
During operation, production equipment generates significant heat—such as plasma etchers—which, if not dissipated effectively, can compromise process stability or even damage equipment. The chiller acts as a “cooling agent,” removing excess heat and extending equipment lifespan.
Effective temperature control also improves product yield by preventing issues like wafer warping or structural abnormalities, which is critical for production efficiency. Additionally, certain key components, such as lasers and vacuum pumps, are highly temperature-sensitive. Chillers can provide dedicated cooling for these components, ensuring their stable operation.
Even in cleanrooms, where environmental requirements are strict, chillers can support HVAC systems to maintain appropriate temperature and humidity. Advanced processes, such as EUV lithography, demand even more extreme temperature control, which chillers can readily achieve. In short, with the support of chillers, semiconductor manufacturing becomes more efficient and reliable.
3.Semiconductor chillers are divided into two types.
Thermoelectric cooling chiller.
This is a small but efficient cooling solution based on the thermoelectric effect. When direct current flows through a thermocouple composed of p-type and n-type semiconductors, the “carriers” of the current—electrons—transfer heat from the cold side to the hot side. The result? The cold side cools down, and the hot side heats up, completing the cooling process. Interestingly, reversing the current direction swaps the hot and cold sides, enabling both cooling and heating functions.
Its structure is straightforward:
• Heat sink: Removes excess heat.
• P-type and N-type semiconductors: Handle the core cooling task.
• Hot and cold side electrodes: Serve as energy bridges.
• DC power supply: Provides the driving force.
• Control circuit: Ensures stable and intelligent operation.
Together, these components enable a reliable and efficient thermoelectric cooling system.
Compressor-based cooling chiller.
This type of cooling process is like running a marathon, steadily completing a closed-loop cycle. The compressor first sucks in the low-pressure vapor from the evaporator, “compresses” it into a high-temperature, high-pressure gas, and then pushes it into the condenser to cool down and become a high-pressure liquid. Next, the high-pressure liquid passes through the expansion valve, “slimming” down into a low-pressure liquid, and is then sent back to the evaporator to absorb heat and evaporate. Throughout the process, heat is continuously “transferred,” causing the equipment to cool down.
The key components include the evaporator, compressor, condenser, and expansion valve. The evaporator absorbs heat, the compressor compresses and pushes the refrigerant, the condenser dissipates heat, and the expansion valve regulates the flow. When working in harmony, the cooling effect is excellent!
Additionally, regardless of the chiller type, a circulation pump and control system are essential. The circulation pump keeps the cooling fluid moving, while the control system acts as the “commander,” adjusting the temperature based on sensor feedback, ensuring the system operates accurately and stably.
4. Famous manufacturers of chillers.
Since 1952, they have provided reliable fluid coolers for various industries, offering standard or customized systems for the semiconductor industry to meet different size and portability requirements. Their products have a long service life and are suitable for various semiconductor manufacturing processes.
An American manufacturer whose chillers are used for process environment control, fluid transport process control, and wafer environment control.
Their semiconductor device high and low-temperature testing equipment chiller offers temperature control accuracy of ±0.1°C, utilizing advanced control technologies to enhance device stability, control accuracy, and response speed. It is used in various semiconductor-related fields, including etching devices and CMP.
