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Heat Exchange Chiller ETCU

Heat Exchange Chiller (Semiconductor temperature control )

ETCU 5℃~90℃

Chiller high precision hot and cold circulator Chillers Cooling Chiller TCU heat exchange and temperature control system

cooling chiller semiconductor chiller

Temp Range: +5℃~90℃ ±0.3℃

Cooling Capacity: 5kw~30kw

Tank volume: 6L~15L

Power: 06KW~1.6KW

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Model	ETCU-005W	ETCU-015W	ETCU-030W	ETCU-050W	ETCU-100W	ETCU-200W	ETCU-300W
Temperature range	Cooling water temperature +5℃~90℃
Temperature control accuracy	±0.05℃ (outlet temperature steady state)
Cooling water temperature	7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow
Cooling capacity	5kw	15kw	30kw	50kw	100kw	200kw	300kw
Circulating pump flow	Test conditions: At maximum circulation, the temperature difference between the control temperature and the cooling water temperature is 15°C
Storage tank volume	7~20L/min 5bar	15~40L/min 5bar	20~60L/min 5bar	40~110L/min 5bar	150~250L/min 5bar	250~500L/min 5bar	400~650L/min 5bar
Dimensions	5L	10L	20L	30L	60L	120L	240L
Dimensions	480750390	480750390	480750500	Customization	Customization	Customization	Customization

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