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Multi-channel FLTZ multi-channel

Semicnductor Multi-channel Chiller

FLTZ 30℃~100℃
Chiller high precision hot and cold circulator
  • Temperture accuracy±0.1℃
  • RefrigentR404A
  • Flow control25~75/min 6bar max
  • Power range380V 3kW~17kW
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Product details parameters

FLTZ -10℃~90℃ Dual Channel

Model FLT-215W/ETCU-015W/ETCU-008W
Pipeline Channel 1 Channel 2 Channel 3
Temperature range  -20℃～+50℃  +30℃～+100℃  +30℃～+40℃
Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃
Cooling capacity 15kW@-10℃ 13kW@PCW+15℃ 8kW@PCW+10℃
Heating capacity 2kW 6kW Pump Heat Loss
Heat transfer medium flow 30L/min@0.85MPa 30L/min@0.85MPa 20L/min@0.8MPa
Heat transfer medium interface ZG3/4 ZG3/4 ZG3/4
Ambient temperature 10～35 ℃ 10～35 ℃ 10～35 ℃
Ambient humidity 30～70% 30～70% 30～70%
Cooling water temperature 15～20℃ 15～20℃ 15～20℃
Cooling water flow 30L/min@15~20℃ 15L/min@15~20℃ 15L/min@15~20℃
Circuit breaker 75A
Process temperature control Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm
Weight 600kg
Dimensions 600*1000*1700

Model FLTZ-203W/2T Dual system FLTZ-305W/2T Dual system FLTZ-406W/2T Dual system
Temperature range -20℃~90℃  -30℃~90℃ -45℃~90℃
Temperature control accuracy ±0.1℃
Flow control and pressure 15~45l/min 6bar max
Heating 2.5kw 2.5kw 2.5kw 2.5kw 3.5kw 3.5kw
Cooling capacity 3KW at-15℃ 3KW at-15℃ 5KW at-15℃ 5KW at-15℃ 2.5KW at -35℃ 2.5KW at -35℃
Internal circulation liquid volume 5L 5L 8L 8L 8L 8L
Expansion tank volume 15L 25L 25L
Heat transfer medium Fluorination, antifreeze, thermal silicone oil, etc.
Refrigerant R404A/ R448
Heat transfer medium interface ZG3/4
Cooling water interface ZG3/4
Cooling water 50L/min at20℃ 600L/min at20℃ 50L/min at20℃
Power supply Three-phase220V  /  Three-phase 400V  /Three-phase 460V
Process temperature control Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm
FLTZ -45℃~90℃ Dual Channel

Model FLTZ-203W/2T dual system FLTZ-305W/2T  dual system FLTZ-406W/2T dual system
Temperature range -20℃~90℃  -30℃~90℃ -45℃~90℃
Temperature control accuracy ±0.1℃
Heat conducting medium flow rate 15~45l/min 6bar max
Heating capacity 2.5kW 2.5kW 2.5kW 2.5kW 3.5kW 3.5kW
Cooling capacity 3kW at-15℃ 3kW at-15℃ 5kW at-15℃ 5kW at-15℃ 2.5kW at -35℃ 2.5kW at -35℃
Internal circulation fluid volume 5L 5L 8L 8L 8L 8L
Expansion tank volume 15L 25L 25L
Heat-conducting medium Fluorinated liquid, antifreeze, thermal conductive silicone oil, etc
Refrigerant R404A/ R448
Heat-conducting medium interface ZG3/4
Cooling water interface ZG3/4
Cooling water interface 50L/min at20℃ 600L/min at20℃ 50L/min at20℃
Power Three phase 220V/Three phase 400V/Three phase 460V
Process temperature control The remote target temperature can be controlled by combining the self created model free self built tree
algorithm and cascade algorithm
FLTZ -20℃~90℃ Dual Channel

Model FLTZ-203W-2T
Pipeline Channel 1 Channel 2
Temperature range  -20℃～+90℃  -20℃~～90℃
Temperature control accuracy ±0.1℃ ±0.1℃
Cooling capacity 4kW@-10℃ 4kW@-10℃
Heating capacity 2kW 2kW
Heat transfer medium flow 20L/min@0.5MPa 20L/min@0.5MPa
Heat transfer medium interface ZG3/4 ZG3/4
Ambient temperature 10～35℃ 10～35℃
Ambient humidity 30～70% 30～70%
Cooling water temperature 15～20℃ 15～20℃
Cooling water flow 20L/min 20L/min
Circuit breaker 30A
Process temperature control Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm
Weight 400kg
Dimensions 500*900*1600

Temperature control in semiconductor production testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method

WechatIMG520
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Product Descriptions


1. Independent Temperature Ranges: Supports multiple channels with separate temperature control ranges to meet diverse operational needs.
2. Cooling and Heating Capabilities: Enables both cooling and heating functions for enhanced flexibility in temperature management.
3. Flexible System Options: Offers two system configurations—steam compression refrigeration or ETCU compressor-free heat exchange systems—tailored to the required temperature range.
4. Integrated Design: Incorporates components like expansion tanks, condensers, and cooling water systems to optimize performance and efficiency.
5. Compact and User-Friendly: Designed to reduce equipment size and simplify operational steps, improving overall usability and convenience.

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